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The second-generation vertical silicon carbide coating equipment achieves an iterative upgrade in process technology!

2025-12-03

Zhou Shihao

Recently, the company’s independently developed second-generation vertical silicon carbide coating equipment has successfully achieved an iterative upgrade of its process technology, increasing the furnace loading capacity by 70%. The coating cycle has been shortened by 33%!

After more than 30 rounds of process trials and structural design optimizations, the R&D team successfully overcame several technical challenges, including the uniform control of flow and temperature fields, matching of coating processes, and reduction of by-products. By continuously optimizing process parameters while ensuring product performance, the loading capacity of the second-generation vertical silicon carbide coating equipment has increased by 70% compared to the first-generation model. The coated products manufactured using this equipment meet all technical specifications: total ash content ≤ 1 ppm, thickness uniformity of 100 μm ± 15%, silicon-to-carbon ratio close to 1:1, hardness ≥ 25 GPa, and β-SiC crystal structure. Moreover, the coating cycle has been shortened to just 2 days per furnace, fully satisfying customer demand for high-performance coated products and enhancing the company’s market competitiveness in large-scale production.

 

 

 

The iterative upgrade of the second-generation vertical silicon carbide coating equipment effectively meets the market’s diversified and large-scale demands. In the future, the company will continue to deepen its expertise in the semiconductor coating equipment field, consistently enhancing its independent innovation capabilities and core technological strengths, thereby supporting the company’s high-quality development.

 

Author: Zhou Shihao

Proofreading/Shi Yujie

Editor-in-charge/Nie Chunyan

 

 

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